Patent Number: 6,251,699

Title: Method for fabricating micromechanical components

Abstract: A method for fabricating micromechanical components, which provides for depositing one or a plurality of sacrificial layers on a silicon substrate and, thereon, a silicon layer. In subsequent method steps, a structure is patterned out of the silicon layer, and the sacrificial layer is removed, at least under one section of the structure. The silicon layer is doped by an implantation process.

Inventors: Fuertsch; Matthias (Gomaringen, DE), Offenberg; Michael (Kirchentellinsfurt, DE)

Assignee: Robert Bosch GmbH

International Classification: B81B 3/00 (20060101); H01L 021/00 ()

Expiration Date: 06/26/2018