Patent Number: 6,251,715

Title: Thin film transistor-liquid crystal display and a manufacturing method thereof

Abstract: The present invention relates to a thin film transistor-liquid crystal display (hereinafter referred to as a TFT-LCD) and a manufacturing method thereof. An amorphous silicon is deposited on a substrate. The amorphous silicon is transformed into a poly silicon by method of solid phase crystallization, and the first poly silicon layer pattern is formed by etching. An amorphous silicon is deposited on the first poly silicon layer pattern. The amorphous silicon is transformed into a second poly silicon layer by method of solid phase crystallization.

Inventors: Jung; Byung-Hoo (Seoul, KR), Jin; Yong-Suk (Kyungki-do, KR), Lee; Joo-Hyung (Seoul, KR), Hwang; Chang-Won (Seoul, KR)

Assignee: Samsung Electronics Co., Ltd.

International Classification: G02F 1/1362 (20060101); H01L 21/336 (20060101); G02F 1/13 (20060101); H01L 27/12 (20060101); H01L 21/70 (20060101); H01L 21/84 (20060101); H01L 21/20 (20060101); H01L 21/02 (20060101); H01L 021/00 (); H01L 021/84 ()

Expiration Date: 06/26/2018