Patent Number: 6,251,835

Title: Surface planarization of high temperature superconductors

Abstract: Planarizing High Temperature Superconductor (HTS) surfaces, especially HTS thin film surfaces is crucial for HTS thin film device processing. Disclosed is a method of surface planarization for HTS film. The method includes first smoothing the HTS surface by Gas Cluster Ion Beam bombardment, followed by annealing in partial pressure of oxygen to regrow the damaged surface layer. A rough HTS surface can be planarized down to a smoothness with a standard deviation of one nanometer or better.

Inventors: Chu; Wei-Kan (Pearland, TX), Wu; Judy Z. (Lawrence, KS)

Assignee: Epion Corporation

International Classification: C30B 31/00 (20060101); C30B 33/00 (20060101); C30B 31/22 (20060101); H01L 39/24 (20060101); B05D 001/00 (); C30B 033/00 (); C30B 031/00 ()

Expiration Date: 06/26/2018