Patent Number: 6,252,668

Title: Systems and methods for quantifying nonlinearities in interferometry systems

Abstract: The invention features interferometry systems and methods that quantify nonlinearities, e.g., cyclic errors, in an interference signal produced by an interferometry system. The systems and methods analyze interference signals for each of multiple Doppler shifts to thereby resolve nonlinearities that may otherwise overlap spectrally with a dominant interference signal, and also, to interpolate the contributions of the nonlinearities to measurements at different Doppler shifts. The time-varying interference signal or the phase extracted from the time-varying interference signal is Fourier transformed and at least some of the nonlinearities are associated with peaks in the square modulus of the Fourier transformed signal (i.e., the power spectrum). The amplitude and phase of the Fourier transform at the frequency of each such peak are used to quantify the associated nonlinearity. The quantified nonlinearities are used to correct optical path length measurements by the system. Changes in the magnitude of one or more of the quantified nonlinearities can also be used to identify degradation of a component of the interferometry system.

Inventors: Hill; Henry A. (Tucson, AZ)

Assignee: Zygo Corporation

International Classification: G01B 9/02 (20060101); G03F 7/20 (20060101); G01B 009/02 ()

Expiration Date: 06/26/2018