Patent Number: 6,252,999

Title: Planar reflective light valve backplane

Abstract: A planar wafer based device (e.g., a reflective light valve backplane) includes a substrate having a plurality of surface projections (e.g., pixel mirrors) defining gaps therebetween, an etch-resistant layer formed on the substrate, and a fill layer formed on a portion of the etch-resistant layer in the gaps. In a particular embodiment, the fill layer is a spin-on coating. An optional protective layer formed on the exposed portions of the etch-resistant layer and the fill layer protects the underlying layers during subsequent processing steps.

Inventors: Haskell; Jacob Daniel (Palo Alto, CA), Hsu; Rong (Cupertino, CA)

Assignee: Aurora Systems, Inc.

International Classification: G02F 1/1335 (20060101); G02F 1/1362 (20060101); G02F 1/13 (20060101); G02F 1/1333 (20060101); G02B 006/12 ()

Expiration Date: 06/26/2018