Patent Number: 6,253,118

Title: Substrate transport method and apparatus

Abstract: A substrate transport method includes the steps of depositing a first substrate in a buffer section having a plurality of storages for temporarily storing substrates to transfer the substrates between a processing unit for performing various substrate treatments before and after an exposing process and an exposure unit for performing the exposing process, by actuating a first substrate transport device for transporting the substrates between the buffer section and the exposure unit and/or a second substrate transport device for transporting the substrates between the buffer section and the exposure unit; and depositing a second substrate on one of the storages next but at least one to a storage on which the first substrate is stored.

Inventors: Koyama; Yasufumi (Kyoto, JP)

Assignee: Dainippon Screen Mfg. Co., Ltd.

International Classification: B65G 49/07 (20060101); G06F 7/00 (20060101); H01L 21/02 (20060101); H01L 21/027 (20060101); H01L 21/67 (20060101); H01L 21/68 (20060101); G06F 007/00 ()

Expiration Date: 06/26/2018