Patent Number: 6,253,605

Title: Semiconductive flow proportioner

Abstract: A proportioning element (10) for proportioning a fluid flow from an input side to an output side of the proportioning element (10) comprises a membrane (12) provided with at least one opening (16) acting as a flow resistor for a medium to be proportioned. The membrane (12) has additionally integrated therein a pressure sensor (14) used for detecting a pressure difference between the input side and the output side of the proportioning element (10). The proportioning element is implemented as a semiconductor chip, the membrane (12) being a semiconductor membrane and areas of the semiconductor chip which are exposed to the medium to be proportioned being provided with a passivation layer.

Inventors: Richter; Martin (Munchen, DE)

Assignee: Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.

International Classification: G01F 1/34 (20060101); G01F 1/38 (20060101); G01F 1/36 (20060101); G01F 13/00 (20060101); G05D 7/06 (20060101); G01F 005/00 (); G01F 001/38 (); G01F 001/22 ()

Expiration Date: 07/03/2018