Patent Number: 6,254,362

Title: Vacuum pump with dust collecting function

Abstract: A vacuum pump with dust collecting function is proposed to deal with the case where dust produced by a process of productions by reaction in a processing vessel under vacuum may to enter a vacuum pump. During evacuation of a processing vessel by a vacuum pump, an auxiliary dust collecting path is closed by a shut-off valve and evacuation through a main exhaust path is carried out. During a period in which evacuation by the vacuum pump is not necessary, the auxiliary dust collecting path is open to form a circulation path with the main exhaust path to carry out collection of the dust by a dust separator.

Inventors: Higuchi; Tsutomu (Yokohama, JP), Kambe; Shigeharu (Kawasaki, JP)

Assignee: Unozawa-Gumi Iron Works, Ltd.

International Classification: F04C 29/00 (20060101); F04B 017/00 ()

Expiration Date: 07/03/2018