Patent Number: 6,254,673

Title: Auxillary vacuum apparatus and method for crystal growth

Abstract: A crystal pulling apparatus is disclosed which employs the Czochralski method. The crystal pulling apparatus is operated while a containing a crucible of molten material, while maintaining the growing chamber under a controlled pressure of less than atmospheric. In the event of a vacuum pump unexpectedly ceasing operation, power to the heater is terminated, thus allowing the molten material to solidify. In such an event, a second vacuum pump can readily be attached to the growing chamber thus restoring pressure control, and allowing power to the heater to be restored.

Inventors: Johnson; Aaron W. (Vancouver, WA), LaBrie; Aaron L. (Vancouver, WA), Spradlin; Randall (Battle Ground, WA)

Assignee: SEH America, Inc.

International Classification: C30B 15/00 (20060101); C30B 015/00 ()

Expiration Date: 07/03/2018