Patent Number: 6,254,688

Title: Cleaning method

Abstract: For cleaning a wafer by a cleaning apparatus, a cleaning liquid is contained in a cleaning bath. Leaving two brushes open, the wafer is inserted to the cleaning bath, placed on oscillation and rotation rollers and retained by the rollers. The brushes are closed and the wafer is held by the brushes. Next, the two brushes are rotated while the wafer is oscillated and rotated by the rollers and so on. Furthermore, ultrasonic vibrations are applied to the cleaning liquid in the cleaning bath by an ultrasonic generator. Scrub cleaning with the two brushes and ultrasonic cleaning by ultrasonic vibrations are thereby performed on the wafer.

Inventors: Kobayashi; Kanji (Saku, JP), Kudo; Jun (Akita, JP), Yamaguchi; Masao (Komoro, JP), Yoshihara; Shinya (Kisakatamachi, JP)

Assignee: TDK Corporation

International Classification: B08B 1/04 (20060101); B08B 3/12 (20060101); H01L 21/00 (20060101); B08B 003/12 ()

Expiration Date: 07/03/2018