Patent Number: 6,254,719

Title: Method for controlled removal of material from a solid surface

Abstract: A catalytic method and an apparatus for selectively removing material from a solid substrate is provided. The method comprises contacting a surface of a solid substrate with a catalyst material in the presence of a reactant under conditions effective to selectively remove material from those areas of said solid substrate in contact with said catalyst material and said reactant.

Inventors: Cheek; Roger W. (Essex Junction, VT)

Assignee: International Business Machines Corporation

International Classification: H01L 21/02 (20060101); H01L 21/306 (20060101); H01L 21/311 (20060101); H01L 021/302 (); C23F 001/02 ()

Expiration Date: 07/03/2018