Patent Number: 6,254,763

Title: Method for manufacturing high concentration ozone gas

Abstract: A method for manufacturing high concentration ozone gas, characterized by employing a pressure swing adsorbing apparatus having a plurality of adsorbing layers filled with ozone adsorbent, in which the ozone adsorbent is one or two or more kinds of adsorbent selected from the group consisting of high silica pentasyl zeolite, dealuminized fogersite, and mesoporous silicate. A method for manufacturing high concentration ozone gas, characterized by employing a TSA adsorbing system, and recovering the concentrated ozone gas continuously, in which the ozone adsorbent is one or two or more kinds of above adsorbent, and the gas containing ozone from the ozone generating apparatus is cooled by the oxygen concentrated gas at a relatively low temperature flowing out from the adsorbing layers in the adsorbing process.

Inventors: Izumi; Jun (Nagasaki, JP), Yasutake; Akinori (Nagasaki, JP), Tomonaga; Nariyuki (Nagasaki, JP), Tsutaya; Hiroyuki (Nagasaki, JP)

Assignee: Mitsubishi Heavy Industries, Ltd.

International Classification: B01D 53/04 (20060101); B01D 53/047 (20060101); C01B 13/10 (20060101); C25C 001/00 ()

Expiration Date: 07/03/2018