Patent Number: 6,254,767

Title: Semiconductor device manufacturing apparatus having controller detecting function of filter

Abstract: A semiconductor device manufacturing apparatus. The semiconductor device manufacturing apparatus includes: a tank having an inlet and an outlet, for storing a chemical solution; a pump interposed between the inlet and outlet of the tank, for circulating the chemical solution contained in the tank; a filter interposed between the pump and the inlet of the tank; at least one main body connected to an outlet of the filter; a pumping cycle sensor for changing the pumping operation of the pump into a pulse signal; and a controller for measuring the cycle time of the pulse signals generated by the pumping cycle sensor to determine the level of deterioration of the filter.

Inventors: Shin; Sung-ki (Pusan, KR), Hah; Sang-rok (Seoul, KR)

Assignee: Samsung Electronics Co., Ltd.

International Classification: H01L 21/00 (20060101); B01D 017/12 ()

Expiration Date: 07/03/2018