Patent Number: 6,254,928

Title: Laser pyrolysis particle forming method and particle forming method

Abstract: The invention comprises particle forming methods, laser pyrolysis particle forming methods, chemical mechanical polishing slurries, and chemical mechanical polishing processes. In but one preferred implementation, a particle forming method includes feeding a first set of precursors to a first energy application zone. Energy is applied to the first set of precursors in the first energy application zone effective to react and form solid particles from the first set of precursors. Application of any effective energy to the solid particles is ceased and the solid particles and a second set of precursors are fed to a second energy application zone. Energy is applied to the second set of precursors in the second energy application zone effective to react and form solid material about the solid particles from the second set of precursors. Preferably, at least one of the first and second applied energies comprises laser energy.

Inventors: Doan; Trung Tri (Boise, ID)

Assignee: Micron Technology, Inc.

International Classification: B01J 2/00 (20060101); B01J 19/12 (20060101); B01J 12/00 (20060101); B01J 12/02 (20060101); C01B 33/00 (20060101); C01B 33/12 (20060101); C01B 21/076 (20060101); C01B 21/00 (20060101); C01B 21/06 (20060101); B05D 005/00 (); B05D 007/00 (); B01J 013/02 (); B22F 001/00 (); C01B 021/06 ()

Expiration Date: 07/03/2018