Patent Number: 6,254,934

Title: Method for controlled deposition of mirror layers

Abstract: A method and apparatus for depositing spatially substantially uniform layers of material onto a plurality of substrates positioned upon a rotatable tool within a vacuum chamber. The chamber is generally of the type that includes a sealable volume bounded by six orthogonally-arranged chamber walls. Apparatus is provided within the chamber for generating a flux of the coating material of known spatial character. A mask of predetermined shape is engaged to apparatus, including a linkage and a linear translation stage driven by a programmable stepper motor, for controllably advancing it during deposition with respect to the mounted substrate.

Inventors: Cherbettchian; Agop H. (Santa Monica, CA), Koran; Martin (Simi Valley, CA), Ratkovic; Lynette (Los Angeles, CA), Stewart; Alan F. (Thousand Oaks, CA)

Assignee: Litton Systems, Inc.

International Classification: C23C 14/54 (20060101); C23C 14/04 (20060101); C23C 14/50 (20060101); G02B 5/08 (20060101); B05D 001/32 ()

Expiration Date: 07/03/2018