Patent Number: 6,255,132

Title: Method of lining up micro-balls

Abstract: A method of lining up micro-balls on an arraying jig includes removing an excess of the micro-balls located thereat with ease. The micro-balls are supplied onto the arraying jig having a plurality of array holes formed therein. A cylindrical body is disposed above the arraying jig, and the micro-balls are maintained at the array holes by an air vacuum through the array holes of the arraying jig. A standing wave having nodes formed concentrically is generated inside the cylindrical body by subjecting the cylindrical body to ultrasonic vibration, so that the micro-balls are concentrated at the nodes of the standing wave. By moving the cylindrical body horizontally over the arraying jig while maintaining the ultrasonic vibration, the micro-balls are distributed into the respective array holes. By weakening a suction force acting through the array holes and subjecting the cylindrical body to ultrasonic vibration while moving the cylindrical body horizontally over the arraying jig, the excess of the micro-balls at the top of the arraying jig is concentrated at the nodes of the standing wave, and then is removed.

Inventors: Fujimura; Naoyuki (Tokyo, JP)

Assignee: Ando Electric Co., Ltd.

International Classification: H01L 21/683 (20060101); H01L 21/67 (20060101); H01L 21/68 (20060101); H01L 021/00 ()

Expiration Date: 07/03/2018