Patent Number: 6,255,189

Title: Method of manufacturing a semiconductor device in a silicon body, a surface of said silicon body being provided with an alignment grating and an at least partly recessed oxide pattern

Abstract: In the known process for manufacturing a semiconductor device, in particular an integrated circuit, in a silicon body, a surface of said silicon body is provided with an alignment grating formed in accordance with a pattern of strips of adjacent elevations and valleys, and with a partially recessed oxide pattern at the location of a semiconductor device by subsequently providing the surface of the silicon body with a masking layer of anti-oxidation material having apertures at the location of the semiconductor device and subjecting the silicon body to an oxidation treatment. The process is simplified considerably by applying the alignment pattern (7) simultaneously with the partially recessed oxide pattern (12) of the semiconductor device (5). For this purpose, the masking layer of anti-oxidation material is applied at the location of the alignment pattern which consists of first wide strips, which are totally free of recessed oxide, and second wide strips, which are each formed by a sub-pattern of relatively narrow strips of anti-oxidation material alternating with relatively narrow apertures, which are smaller than the apertures at the location of the semiconductor device. During the subsequent oxidation treatment, each of the second wide strips is provided with a segmented, partially recessed oxide pattern (14) with a profiled surface. The relatively narrow apertures have a width such that the partially recessed oxide pattern (14) at the location of the alignment pattern (7) is thinner than the partially recessed oxide pattern (12) simultaneously formed at the location of the semiconductor device (5).

Inventors: Muller; Christiaan J. (Nijmegen, NL), Driessen; Frank A. J. M. (Nijmegen, NL)

Assignee: U.S. Philips Corporation

International Classification: G03F 9/00 (20060101); H01L 23/544 (20060101); H01L 021/76 ()

Expiration Date: 07/03/2018