Patent Number: 6,255,223

Title: Substrate handling method and apparatus, and attractive force inspection method and apparatus used therewith

Abstract: Data related to an attractive force between a substrate holder 3 and a substrate 2 is detected when pushing up and releasing the substrate 2 from the substrate holder 3, and when the attractive force is detected to be greater than a predetermined value, the push-up operation is regulated by a controller 18.

Inventors: Matsuda; Izuru (Kadoma, JP), Haraguchi; Hideo (Toyonaka, JP), Yamamoto; Shigeyuki (Nara, JP)

Assignee: Matsushita Electric Industrial Co., Ltd.

International Classification: H01L 21/683 (20060101); H01L 21/67 (20060101); H01L 21/00 (20060101); H02N 13/00 (20060101); H02N 013/00 (); H05F 003/00 (); B23B 005/22 (); B23B 031/28 ()

Expiration Date: 07/03/2018