Patent Number: 6,283,695

Title: Tray conveying apparatus and method

Abstract: In a tray conveying apparatus and method for, for instance, semiconductor parts, a main station and substation which have a tray conveying function are driven slidably in a direction perpendicular to a tray conveying line by a station sliding mechanism. When the preparation of a satisfactory-parts tray is required, the sub-station is positioned on the conveying line, and a satisfactory-parts tray is prepared on this sub-station by means of the exchange of parts, etc. Afterward, both main station and sub-station are caused to slide so that the main station is positioned on the conveying line. In this state, the satisfactory-parts tray is positioned in the vicinity of the conveying line, and a tray on the main station is replenished with satisfactory parts from the satisfactory-parts tray. A table sliding mechanism is further provided that has an upper-stage table, which carries a defective-parts tray, and a lower table, which caries a reclaimable-parts tray.

Inventors: Nakagawa; Takeyuki (Tachikawa, JP), Chiyo; Yasuo (Musashimurayama, JP)

Assignee: Kabushiki Kaisha Shinkawa

International Classification: G01R 31/01 (20060101); H01L 21/67 (20060101); H01L 21/00 (20060101); H01L 21/677 (20060101); B65G 047/06 ()

Expiration Date: 09/04/2018