Patent Number: 6,283,730

Title: Micro pump and method of producing the same

Abstract: A micro pump is made compact and can prevent members constituting the micro pump from being chemically reacted with a working fluid, and a method of producing the same. After each of substrates constituting the micro pump is formed by a member containing a silicone as a main composition and a plurality of metal membranes are formed on a whole of a bonding surface of each of the substrates so as to form bonding surfaces, the bonding surfaces are cleaned, and the bonding surfaces are opposed to each other under a vacuum condition, overlapped, heated and pressed so as to be bonded. The valve portion has a beam and a protrusion for sealing as provided in the valve side, whereby a pressure applied to the protrusion becomes smaller than the bonding pressure.

Inventors: Sasaki; Yasuhiko (Niihari-gun, JP), Yoshimura; Yasuhiro (Niihari-gun, JP), Koide; Akira (Inashiki-gun, JP), Miyake; Ryo (Tsukuba, JP), Watanabe; Naruo (Niihari-gun, JP), Terayama; Takao (Ushiku, JP), Mitsumaki; Hiroshi (Mito, JP), Ishida; Yasuhiko (Hitachinaka, JP), Morioka; Tomonari (Hitachinaka, JP)

Assignee: Hitachi, Ltd.

International Classification: F04B 43/02 (20060101); F04B 43/04 (20060101); F04B 017/00 ()

Expiration Date: 09/04/2018