Patent Number: 6,293,109

Title: Pulse pipe refrigerating machine and cryopump using the refrigerating machine

Abstract: A pulse tube refrigerator which enables holding a cooling temperature without the use of a heater and the like. The pulse tube refrigerator employs a working gas which has a liquefying temperature within the range of an operating temperature of the pulse tube refrigerator.

Inventors: Miyamoto; Atsushi (Osaka, JP), Kakimi; Yasuhiro (Osaka, JP), Kunitani; Shingo (Osaka, JP), Ito; Daisuke (Osaka, JP)

Assignee: Daido Hoxan Inc.

International Classification: F04B 37/00 (20060101); F04B 37/08 (20060101); F25B 9/14 (20060101); F25B 009/00 (); B01D 008/00 ()

Expiration Date: 09/25/2018