Patent Number: 6,293,149

Title: Acceleration sensor element and method of its manufacture

Abstract: A flexure transducer element used in an acceleration sensor for sensing anacceleration applied thereto and the method of making the same. Theflexure transducer element comprises a frame, a sheet member, a weight,and a support member.

Inventors: Yoshida; Hitoshi (Osaka, JP), Tomonari; Shigeaki (Osaka, JP), Oka; Naomasa (Kyoto, JP), Nakamura; Takuro (Yao, JP), Ishida; Takuro (Kawachinagano, JP), Kamakura; Masanao (Hirakata, JP), Kasano; Fumihiro (Sakai, JP)

Assignee:

International Classification:

Expiration Date: 09/25/2013