Patent Number: 6,293,154

Title: Vibration compensated pressure sensing assembly

Abstract: A pressure sensing device for producing an output proportional to an applied pressure irrespective of vibration and acceleration of the device, the device including: a first deflecting diaphragm formed in a first wafer and including a first plurality of piezoresistors mounted thereon, the first diaphragm being responsive to the applied pressure and vibration of the device; and, a second deflecting diaphragm formed in the first wafer and including a second plurality of piezoresistors mounted thereon, the second diaphragm being responsive only to vibration of the device; wherein, the first and second pluralities of piezoresistors are electrically coupled together to provide a common output such that they cooperatively at least partially cancel a portion of the common output associated with the vibration of the device.

Inventors: Kurtz; Anthony D. (Ridgewood, NJ)

Assignee: Kulite Semiconductor Products

International Classification: G01L 19/02 (20060101); G01L 19/00 (20060101); G01L 9/00 (20060101); G01L 009/06 ()

Expiration Date: 09/25/2018