Patent Number: 6,294,722

Title: Integrated thin-film solar battery

Abstract: A sputtering-deposition method usable in forming on an insulator substrate a film including a conductive layer includes the steps of: preparing a conductive substrate holder in the form of a frame having an opening at its central area and electrically grounded; positioning the insulator substrate to cover the opening of the holder; arranging a flexible spacer on a peripheral edge of the substrate and also superposing a back plate on the spacer to press the substrate against the holder via the spacer; pressing and fixing the back plate to the holder; and then sputtering a separately provided target to deposit a new layer on a region of the substrate exposed in the holder's opening.

Inventors: Kondo; Masataka (Kobe, JP), Suzuki; Takayuki (Otsu, JP)

Assignee: Kaneka Corporation

International Classification: H01L 27/142 (20060101); H01L 31/052 (20060101); H01L 31/048 (20060101); H01L 31/18 (20060101); H01L 031/042 ()

Expiration Date: 09/25/2018