Patent Number: 6,294,771

Title: Electrically heated substrate with multiple ceramic parts each having different volume resitivities

Abstract: A heater comprising a substrate having a heating surface to treat a substance to be heated on the substrate, a heating element embedded in the substrate, and a resistance control part, wherein the substrate comprises a first ceramic material and the resistance control part comprises a second ceramic material which has higher volume resistivity than that of the first ceramics.

Inventors: Katsuda; Yuji (Tsushima, JP), Araki; Kiyoshi (Nagoya, JP), Ohashi; Tsuneaki (Ogaki, JP)

Assignee: NGK Insulators, Ltd.

International Classification: H05B 3/68 (20060101); H05B 3/74 (20060101); H05B 3/28 (20060101); H05B 3/22 (20060101); H01L 021/205 (); H01L 021/68 ()

Expiration Date: 09/25/2018