Patent Number: 6,294,860

Title: Thin piezoelectric film element, process for the preparation thereof and ink jet recording head using thin piezoelectric film element

Abstract: The present invention provides a thin piezoelectric film having a high piezoelectric strain constant and a good adhesion with a lower electrode which can be produced without being cracked. The present invention also provides an ink jet recording head comprising this thin piezoelectric film as a vibrator. The thin piezoelectric film element of the present invention comprises a PZT film 14 made of a polycrystalline substance, and an upper electrode 16 and a lower electrode 12 arranged with the PZT film interposed therebetween. The grain boundary of the crystalline constituting the PZT film is present almost perpendicular to the surface of the electrode. Further, the orientation of the crystalline constituting the PZT film is controlled to a desired range.

Inventors: Shimada; Masato (Nagano, JP), Takahashi; Tetsushi (Nagano, JP), Kamei; Hiroyuki (Nagano, JP), Qiu; Hong (Nagano, JP)

Assignee: Seiko Epson Corporation

International Classification: B41J 2/14 (20060101); H01L 41/18 (20060101); H01L 41/187 (20060101); H01L 41/24 (20060101); H01L 41/09 (20060101); H01L 041/08 ()

Expiration Date: 09/25/2018