Patent Number: 6,294,892

Title: Method of manufacturing organic thin-film EL device

Abstract: In a method of manufacturing an organic thin-film electroluminescent device, a plurality of thin-film luminescent portions are arranged with fine pitches on a substrate. Each of the luminescent portions is formed by organic electroluminescent material or electrode material. A mask pattern is arranged on a pattern mask moving stage which finely moves in a predetermined direction. The substrate is arranged on a substrate moving stage. The substrate is opposed against the pattern mask with a predetermined pitch. An initial positioning alignment between the substrate and the pattern mask is performed by adjusting the substrate moving stage. The luminescent material is vaporized onto a surface of the substrate through the pattern mask. The luminescent material is vaporized on the surface of the substrate after moving the pattern mask onto a non-vaporizing portion of the surface of the substrate.

Inventors: Utsugi; Koji (Tokyo, JP), Saitoh; Takeshi (Tokyo, JP), Tamegai; Masashi (Tokyo, JP)

Assignee: NEC Corporation

International Classification: H05B 33/10 (20060101); H05B 033/10 ()

Expiration Date: 09/25/2018