Patent Number: 6,294,922

Title: Probe for testing a semiconductor integrated circuit

Abstract: A first assembly configuration features in including: a plurality of probes having a buckling portion to buckle, upon a contact by an end of a contact portion onto an electrode of semiconductor integrated circuit; a first board provided with a first wiring pattern connected with a connecting portion of the probe; a second board removably fastened with the first board and provided with a second wiring pattern connected with the first wiring pattern; housing members mounted with the second board for holding the contact portion of the probe. Next configuration features in including: two kinds of probes; measurement probes and connection probes anew, and a plurality of connection probes include buckling portions to buckle, upon a contact by an end of contact portion onto the wiring pattern provided with the first board when inserted into holes provided with the a second board; wherein through holes provided with the second board are positioned to align to the arrangement of wiring pattern provided with the first board. Thereby, undesirable deviation of contact point by the probe is avoided and a suitable contact pressure is preferably kept, and further convenience in the work of exchanging damaged probes is brought about.

Inventors: Okubo; Masao (Nishinomiya, JP), Okubo; Kazumasa (Kanagawa, JP), Iwata; Hiroshi (Kyoto, JP)

Assignee: Nihon Denshizairyo Kabushiki Kaisha

International Classification: G01R 1/073 (20060101); G01R 031/02 ()

Expiration Date: 09/25/2018