Patent Number: 6,295,128

Title: Optical alignment of superpositioned objects

Abstract: In alignment of superpositioned objects on opposing substrates accuracy and simplicity is achieved through relative movement of the substrates responsive to an image of one object reflected from the surface of the opposite substrate. Alignment of mating fine pitch conductors and pads for bonding is achieved by observation of the reflection of one conductor or pad in the surface of the opposite substrate and relatively moving the substrates to eliminate the reflection.

Inventors: Horton; Raymond Robert (Dover Plains, NY), Narayan; Chandrasekhar (Hopewell Junction, NY), Palmer; Michael Jon (Walden, NY)

Assignee: International Business Machines Corporation

International Classification: H01L 21/67 (20060101); H01L 21/68 (20060101); G02F 1/13 (20060101); G01B 011/00 ()

Expiration Date: 09/25/2018