Patent Number: 6,295,130

Title: Structure and method for a microelectromechanically tunable fabry-perot cavity spectrophotometer

Abstract: A microelectromechanically tunable Fabry-Perot spectrophotometer is provided for color sensing. Optical fiber provides light input to a Fabry-Perot filter which is adjusted by a switched capacitor circuit. Spectral intensity is sensed by an integrated photodetector.

Inventors: Sun; Decai (Sunnyvale, CA), Kubby; Joel A. (Rochester, NY), Tran; Alex T. (Ithaca, NY), Peeters; Eric (Fremont, CA)

Assignee: Xerox Corporation

International Classification: G01J 3/12 (20060101); G01J 3/26 (20060101); G01B 009/02 ()

Expiration Date: 09/25/2018