Patent Number: 6,295,163

Title: Diffractive optical element and scanning optical apparatus using the same

Abstract: Diffraction optical element used in a scanning optical apparatus as a scanning optical element has a diffraction grating formed on a substrate. The diffraction grating has a tilt portion for generating a power and a wall portion connecting one end portion of the tilt portion to the substrate. The wall portion is tilted within a predetermined range with respect to a normal of the substrate surface. The tilt angle of the wall portion of the diffraction grating with respect to the normal of the substrate continuously changes to increase as a distance away from an optical axis of the diffraction optical element becomes large.

Inventors: Kato; Manabu (Toda, JP)

Assignee: Canon Kabushiki Kaisha

International Classification: G02B 13/00 (20060101); G02B 27/00 (20060101); G02B 005/18 (); G02B 026/10 ()

Expiration Date: 09/25/2018