Patent Number: 6,297,502

Title: Method and apparatus for force control of a scanning probe

Abstract: A method for controlling a force acting on a scanning probe of a cantilever by setting bandwidth of a feedback loop constituted by detecting minute displacement of the cantilever and controlling a force of the scanning probe to be greater than a primary resonant frequency of the cantilever.

Inventors: Jarvis; Suzanne Philippa (Tsukuba, JP), Lantz; Mark Alfred (Tsukuba, JP), Duerig; Urs (Rueschlikon, CH)

Assignee: Angstrom Technology Partnership

International Classification: G12B 21/20 (20060101); G12B 21/00 (20060101); G12B 21/08 (20060101); G12B 21/02 (20060101); G01N 013/10 ()

Expiration Date: 10/02/2018