Patent Number: 6,297,503

Title: Method of detecting semiconductor defects

Abstract: A method of detecting defects within a semiconductor device is disclosed. An ion beam is focused in predetermined directions onto an area of a semiconductor device that is believed to have a suspected defect. A portion of the semiconductor device is milled and forms a thin film specimen to be removed from the semiconductor device. The thin film specimen is removed from the semiconductor device and placed onto an insulated film mount. Electrical connection points are created on previously unexposed portions of the thin film specimen by depositing a line of conductive material using a focused ion beam. The surface of the thin film specimen is scanned with an electron beam in a scanning electron microscope and observed for contrast. Processing errors are determined and the lateral resolution is about the electron beam size.

Inventors: Bindell; Jeffrey B. (Orlando, FL), Stevie; Frederick A. (Orlando, FL)

Assignee: Lucent Technologies Inc.

International Classification: G01N 1/32 (20060101); G01R 31/28 (20060101); G01R 31/303 (20060101); H01J 37/305 (20060101); H01L 021/44 (); H01L 021/302 (); H01J 037/317 ()

Expiration Date: 10/02/2018