Patent Number: 6,297,576

Title: Piezoelectric actuator

Abstract: An actuator assembly having a first and a second stack of piezoelectric materials having electrode layers connecting the stacks to a voltage source. A cavity is defined within said first stack and is adapted to receive a first end of the second stack. A first opening and a second opening are defined within the stack wherein each is in fluid communication with the cavity and wherein the first opening has a flat surface within the cavity. A flat face opposite the first opening forms a contact seal with the flat surface. The first and second stacks are adapted to unseal the face from the surface in response to a voltage.

Inventors: Wang; Tak K. (Havertown, PA), Law; Clayton E. (Malvern, PA)

Assignee: Agilent Technologies, Inc.

International Classification: H01L 41/083 (20060101); H01L 041/08 ()

Expiration Date: 10/02/2018