Patent Number: 6,297,578

Title: Piezoelectric/electrostrictive element

Abstract: Disclosed is a piezoelectric/electrostrictive element composed of an actuator section of a uni-morph type comprising a main actuator element including a piezoelectric/electrostrictive layer and a pair of electrodes formed on a first principal surface of the piezoelectric/electrostrictive layer; a vibrating section which contacts with a second principal surface of the piezoelectric/electrostrictive layer for supporting the main actuator element; and a fixed section for supporting the vibrating section in a vibrative manner; wherein a relationship of y=ax is satisfied, and an expression of 1/10.ltoreq.a.ltoreq.100 is satisfied provided that x represents a distance between the pair of electrodes (1 .mu.m.ltoreq.x.ltoreq.200 .mu.m), and y represents a thickness of the piezoelectric/electrostrictive layer (1 .mu.m.ltoreq.y.ltoreq.100 .mu.m). Accordingly, it is possible to greatly increase the relative displacement amount between the no-voltage-loaded state and the voltage-applied state and the relative displacement amount between the states in which mutually opposite electric fields are applied, making it possible to realize easy control when the element is utilized for actuators and improvement in sensitivity when the element is utilized for sensors.

Inventors: Takeuchi; Yukihisa (Nishikamo-Gun, JP), Nanataki; Tsutomu (Toyoake, JP), Takahashi; Masao (Kuwana, JP)

Assignee: NGK Insulators, Ltd.

International Classification: G02B 26/08 (20060101); G09F 9/305 (20060101); G09F 9/30 (20060101); H01L 41/09 (20060101); H01L 041/08 ()

Expiration Date: 10/02/2018