Patent Number: 6,297,580

Title: Surface acoustic wave device and production method thereof and mobile communication equipment using it

Abstract: As the electrode material of a surface acoustic wave device, a laminated body laminating a second metal layer 5 on a first metal layer 4 is stacked up in two or more stages, and the first metal layer 4 is a metal of which coefficient of diffusion to Al is smaller than the coefficient of self diffusion of Al, and the second metal layer 5 is composed of an Al alloy of three elements or more containing at least one or more metals which forms solid solution with Al at ordinary temperature, and at least one or more metals forming segregation at the grain boundary of Al or an intermetallic compound with Al at ordinary temperature, and therefore the surface acoustic wave device excellent in electric power tolerance, compatible with the conventional pattern forming technology, stable thermally, and capable of preventing increase of insertion loss can be obtained.

Inventors: Takayama; Ryouichi (Hirakata, JP), Furukawa; Mitsuhiro (Nishinomiya, JP), Murashima; Yuji (Neyagawa, JP), Sakuragawa; Toru (Moriguchi, JP), Nomura; Koji (Shijonawate, JP)

Assignee: Matsushita Electric Industrial Co., Ltd.

International Classification: H03H 9/00 (20060101); H03H 9/02 (20060101); H03H 9/64 (20060101); H03H 9/145 (20060101); H01L 041/04 ()

Expiration Date: 10/02/2018