Patent Number: 6,297,584

Title: Precision alignment of microcolumn tip to a micron-size extractor aperture

Abstract: A method and an accompanied apparatus for aligning an electron emitter with an extractor hole of a microcolumn. Four V-grooves, defined together with the window for forming the membrane and having bottoms situated on two axis are microfabricated on a chip. The axis intersect at a right angle and defines a center point for the extractor hole. The V-grooves are then used as references to align the electron emitter with the extractor hole, one axis at a time. The emitter is precisely aligned to the extractor hole because the extractor hole was formed with reference to the V-grooves. The thickness of the chip is used as the spacing reference between the emitter and the extractor.

Inventors: Kim; Ho-Seob (Milpitas, CA), Lee; Kim Y. (Fremont, CA), Chang; T. H. P. (Foster City, CA)

Assignee: Etec Systems, Inc.

International Classification: H01J 37/06 (20060101); H01J 37/067 (20060101); H01J 9/18 (20060101); H01J 037/06 ()

Expiration Date: 10/02/2018