Patent Number: 6,297,611

Title: Robot having independent end effector linkage motion

Abstract: A substrate handling system comprises a robot containing mico-environment in communication with a plurality of processing stations. The robot has a robot arm comprising an end effector linkage mounted to an extensible linkage. Each of the linkages is independently actuatable using an associated motor, with the extensible linkage serving to convey the end effector linkage to the vicinity of a target processing station for delivery or retrieval of a substrate. Motion of the linkages may be synchronized to reduce travel time, and multiple end effectors may be mounted to the extensible linkage for increasing throughput.

Inventors: Todorov; Alexander (Sunnyvale, CA), Sotirov; Zlatko (Sunnyvale, CA), Genov; Mila (San Jose, CA)

Assignee: Genmark Automation

International Classification: B25J 9/04 (20060101); B25J 9/06 (20060101); B25J 9/10 (20060101); B25J 18/02 (20060101); B25J 9/02 (20060101); B25J 18/00 (20060101); H01L 21/67 (20060101); H01L 21/677 (20060101); B25J 015/02 ()

Expiration Date: 10/02/2018