Patent Number: 6,297,656

Title: Probe-test method and prober

Abstract: With a probe-test method and a prober for examining certain electric characteristics of an object of examination, a main chuck is adapted to be driven to move in the X-, Y-, Z- and .theta.-directions in order to bring the object into contact with the probes of the prober and then the shaft of the support of the main chuck is warped under the contact pressure applied by the probes to tilt the main chuck. The position where each of the probes contacts the corresponding one of the electrodes on the object is displaced (moved) in the X-, Y- and Z-directions by the tilt. The displacement is predicted by an operation. unit and the main chuck is moved in the X-, Y- and Z-directions to correct the displacement.

Inventors: Kobayashi; Masahito (Yamanashi-ken, JP), Ishii; Kazunari (Kofu, JP)

Assignee: Tokyo Electron Limited

International Classification: G01R 31/28 (20060101); G01R 001/04 ()

Expiration Date: 10/02/2018