Patent Number: 6,297,659

Title: Test system for testing semiconductor device

Abstract: In a test system, a plurality of semiconductor devices (samples) to be tested are connected in parallel. Resistors and switches are connected to the respective semiconductor devices in series. A voltage source (power supply) supplies a constant voltage for the respective semiconductor devices. An ammeter measures current that flows through the respective semiconductor devices. A voltmeter measures the respective voltage drops of the resistors. A controller detects the specific resistor that is changed in a resistance value when the current measured by the ammeter is reduced, and turns off the switch connected to the specific resistor.

Inventors: Saito; Yumi (Tokyo, JP)

Assignee: NEC Corporation

International Classification: G01R 27/14 (20060101); G01R 31/26 (20060101); G01R 031/26 (); G01R 031/02 ()

Expiration Date: 10/02/2018