Patent Number: 6,298,080

Title: Narrow band excimer or molecular fluorine laser with adjustable bandwidth

Abstract: A line-narrowed excimer or molecular fluorine laser system includes a gain medium surrounded by a resonator for generating a laser beam, a discharge circuit including a plurality of electrodes for energizing the gain medium and a line-narrowing unit within the resonator for narrowing the bandwidth of the laser system. The resonator includes a deformable resonator reflector. A technique for adjusting the bandwidth of the laser system includes adjusting a surface contour of the deformable resonator reflector. A desired bandwidth may be selected manually or using a processor which automatically controls the surface contour adjustment.

Inventors: Heist; Peter (Jena, DE), Kleinschmidt; Jurgen (Weissenfels, DE)

Assignee: Lambda Physik AG

International Classification: G03F 7/20 (20060101); H01S 3/139 (20060101); H01S 3/13 (20060101); H01S 3/225 (20060101); H01S 3/14 (20060101); H01S 003/08 (); H01S 003/225 (); H01S 003/10 ()

Expiration Date: 10/02/2018