Patent Number: 6,298,274

Title: Conveyance system in a semiconductor manufacturing process and method forprocessing semiconductor wafer therein

Abstract: A conveyance system in a semiconductor manufacturing process comprises aprocess unit processing a semiconductor wafer, a conveyer conveying thesemiconductor wafer, a conveyer controller controlling the conveyer, and acomputer controlling the conveyer and the conveyer controller. In thesystem, the process unit sends a warning signal to said computer,indicating time of the process completion in the process unit before theprocess is completed, and the conveyer is moved to the process unit inresponse to the warning signal.

Inventors: Inoue; Katsuhiro (Tokyo, JP)

Assignee:

International Classification:

Expiration Date: 10/02/2013