Patent Number: 6,298,312

Title: Method of determining the tip angle of a probe card needle

Abstract: A method is provided for determining the tip angle of a probe needle used to measure electrical characteristics of a circuit device, such as an IC. The spatial coordinates (X.sub.1, Y.sub.1, Z.sub.1), (X.sub.2, Y.sub.1, Z.sub.2), (X.sub.3, Y.sub.1, Z.sub.3), of three spaced apart locations A, B, C along the outer free end of the needle tip are measured. The slopes m.sub.1, m.sub.2 of two longitudinal sections of the needle determined, and the tip angle is then calculated using the slopes m.sub.1, m.sub.2.

Inventors: Chen; Shu Min (Hsin-Chu, TW)

Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.

International Classification: G01R 35/00 (20060101); G01R 1/067 (20060101); G01C 001/00 ()

Expiration Date: 10/02/2018