Patent Number: 6,305,062

Title: Preventive maintenance apparatus for CMP top-ring's backing-film and the method thereof

Abstract: A preventive maintenance method and apparatus for quickly and precisely replacing a backing-film of a CMP machine is provided. In comparison with a conventional backing-film, the backing-film according to the present invention is pre-drilled by laser in order to bypass the restriction set by a conventional manual drilling process on the backing-film. In addition, a PM apparatus for the backing-film comprises an aligning panel having a plural first pins in order to quickly check whether drilled holes of the backing-film are aligned with the corresponding air holes or not. Therefore, the CMP machine down time due to the PM can be reduced.

Inventors: Chen; Ting-Kou (Tainan, TW), Liao; Yong-Sen (Miaoli Hsien, TW), Chang; Frank J. C. (Hsinchu Hsien, TW)

Assignee: Winbond Electronics Corp.

International Classification: B24B 37/04 (20060101); H01L 21/02 (20060101); H01L 21/306 (20060101); B23P 019/04 (); B23P 006/00 ()

Expiration Date: 10/23/2018