Patent Number: 6,305,226

Title: Method and apparatus for imaging acoustic fields in high-frequency acoustic resonators

Abstract: This invention relates to a method and apparatus for imaging acoustic fields in high-frequency acoustic resonators. More particularly, the invention is directed to a scanning RF mode microscope system that detects and monitors vibration of high frequency resonators that vibrate in the frequency range of approximately 1 MHz to 20 GHz. The system then maps with sub-Angstrom resolution vibration modes of such devices and obtains quantitative measurements of the piezoelectric properties of the materials.

Inventors: Barber; Bradley Paul (Chatham, NJ), Gammel; Peter Ledel (Millburn, NJ), Kleiman; Rafael Nathan (New York, NY), Safar; Hugo Fernando (Westfield, NJ)

Assignee: Agere Systems Guardian Corp.

International Classification: G01N 29/06 (20060101); G01N 029/00 ()

Expiration Date: 10/23/2018