Patent Number: 6,305,235

Title: Variable height sensor tree

Abstract: A variable position sensing device is provided. The device includes a fixed track attached to a track holder. An adjustable sensor holder is adapted to receive a sensor and is capable of sliding and locking into position on the fixed track. The sensor device has particular applicability and the semiconductor manufacturing industry for setting sensors at different positions in a liquid chemical holding vessel.

Inventors: Geurian; John D. (Garland, TX), Cooper; David G. (Garland, TX), Hong; Xuong P. (Mesquite, TX)

Assignee: Air Liquide America Corporation

International Classification: G01F 23/00 (20060101); G01D 021/00 (); G01F 023/00 ()

Expiration Date: 10/23/2018