Patent Number: 6,305,392

Title: Method and apparatus for removing processing liquid from a processing liquid delivery line

Abstract: A method and apparatus for desorbing processing liquid from a processing liquid delivery line is provided. Non-thermal energy, such as ultrasonic energy or electromagnetic energy, is applied to a processing liquid delivery line. The non-thermal energy may be applied directly to the processing liquid delivery line, or may be applied indirectly via a conducting medium which distributes the energy along the length of the processing liquid delivery line. When non-thermal energy in the form of electromagnetic energy is employed, the frequency of the electromagnetic energy is adjusted to match the vibrational frequency of the absorbed molecules of processing liquid.

Inventors: Tolia; Anish (San Jose, CA), Mandrekar; Tushar (Santa Clara, CA), Jackson; Michael (Sunnyvale, CA)

Assignee: Applied Materials, Inc.

International Classification: B01J 19/12 (20060101); B01J 19/10 (20060101); B01J 4/00 (20060101); B08B 9/02 (20060101); B65G 53/34 (20060101); B65G 53/52 (20060101); C23C 16/44 (20060101); B08B 009/027 ()

Expiration Date: 10/23/2018