Patent Number: 6,305,565

Title: Transport chamber and method for making same

Abstract: A transport chamber implemented to retrieve a substrate from at least one storage facility that is external to the transport chamber and transition the substrate into at least one processing chamber that is external to the transport chamber is provided. The transport chamber includes a bottom plate having an inner surface that is configured to accept a first O-ring. Further provided is a chamber housing that is defined from a rolled forging. The chamber housing has a top surface, and a bottom surface that is designed to join with the inner surface of the bottom plate such that the first O-ring seal forms a seal. The top surface of the chamber housing is suited to accept a second O-ring seal fastened to the perimeter of the top surface of the chamber housing. The transport chamber further includes a top plate that is configured to sit over the second O-ring seal and thereby form a seal over the top surface of the chamber housing.

Inventors: Boyd; Trace L. (San Jose, CA), Terbeek; Eric A. (Fremont, CA)

Assignee: Lam Research Corporation

International Classification: H01L 21/673 (20060101); H01L 21/67 (20060101); H01L 21/00 (20060101); B65D 008/02 ()

Expiration Date: 10/23/2018