Patent Number: 6,305,840

Title: Thermopile detector and method for fabricating the same

Abstract: Thermopile detector and method for fabricating the same, the method including the steps of (1) forming a diaphragm film on a substrate, (2) forming thermocouples in a given region on the diaphragm film, (3) forming a protection film on the thermocouples, (4) forming a photoresist on the protection film and removing the photoresist from a given region, (5) forming a black body on an entire surface including the photoresist and removing the remaining photoresist and the black body on the photoresist, and (6) removing a portion of the substrate from a given region of a back-side of the substrate, to expose the diaphragm film, thereby facilitating a compatibility of fabrication process with an existing semiconductor fabrication process#(a CMOS fabrication process), whereby improving a mass production capability, preventing a damage to the diaphragm film occurred in formation of the black body, and controlling a property of the black body uniform. And, the easy formation of the black body with a good bonding force allows to improve yield significantly, dropping a thermopile detector production cost.

Inventors: Kim; Insik (Kyungki-do, KR), Kim; Taeyoon (Kyungki-do, KR)

Assignee: LG Electronics Inc.

International Classification: G01J 5/12 (20060101); G01J 005/16 (); G01K 007/12 (); H01L 035/30 (); H01L 035/34 ()

Expiration Date: 10/23/2018