Patent Number: 6,306,019

Title: Method and apparatus for conditioning a polishing pad

Abstract: A method and apparatus for conditioning a polishing pad is described. The method includes steps of moving a cylindrical roller having an abrasive substance affixed to it against a moving polishing pad. The roller may be actively rotated or reciprocated at variable rates, while maintaining a pressure against the polishing pad. The apparatus includes a cylindrical roller attached to one or more pressure application devices mechanically connected to the roller.

Inventors: Finkelman; Alex (San Jose, CA)

Assignee: Lam Research Corporation

International Classification: B24B 21/04 (20060101); B24B 53/00 (20060101); B24B 53/10 (20060101); B24B 37/04 (20060101); B24B 001/00 ()

Expiration Date: 10/23/2018